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XTC/3S

Article: 00091346

Thin-film deposition controller for semiconductor and vacuum coating process

Economical quartz crystal deposition controller engineered for user-programmed software control.

The XTC/3S quartz crystal deposition controller provides a single layer closed-loop controller. This controller is intended for those applications where the process recipe resides on the customer?s computer and each layer of the process is downloaded into the thin film controller as needed.

Features

PLUG-AND-PLAY replacement for XTC/2 controllers*
TFT color LCD with graphics
Membrane keypad
9 programmable films
2 sensor measurement channels
2 source control channels
8/12 dedicated I/O Circuitry
RS-232 computer communications
Interface connectors
Patented Modelock Measurement System
Options

Ethernet computer communications
Handheld power controller for manual operation
Rack mount kit for 1 or 2 units
Limited to XTC/2 features and command set

Specifications

Other items

In this category | In this category, (Kurt J Lesker Company)

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