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  • Plate evaporator / process

BAK 1401

Article: 00042613

Plate evaporator / process

The BAK1401 is one of our largest standard systems with a capacity of 47 six inch or 28 eight inch substrates using a full unsegmented dome

BAK1401 in a nutshell
Ideal for large batch sizes of 6, 8 inch or very large substrate sizes
Flexibility for large numbers of sources
Custom handling solutions

Platform Overview
The 1401 is truly a giant amongst the BAK range, with flexibility to fit numerous barrel sources, e guns and ion sources all on the same baseplate, all managed through the standard Khan system and process controller. However, for even larger chambers we offer custom engineering and substrate handling solutions. Simply complete the enquiry form and your local sales and service organization will be pleased to contact you to discuss your requirements

Specifications

  • Type: plate
  • Laboratory/process: process

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