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Heat exchangers: condensers, evaporators

HORIBA STEC

  • Process evaporator / for liquids
  • Process evaporator / for liquids

VC-1420

Article: 00058914

Process evaporator / for liquids

The Direct Liquid Injection System from HORIBA SEMICONDUCTORS employs new materials that are needed to keep up with the new semiconductor models. With this, there is an increase on the number of different liquid sources and volume needs which are used for the semiconductor manufacturing process.

HORIBASTEC offers a wide range of liquid source vaporization systems that uses different methods like direct injection, baking, and mixing to ensure steady and effective vapor delivery. The Auto-refill systems are also in the comprehensive product line of continuous safe and dependable delivery of the liquid forerunner. This improves operating time and lessens the risks of process contamination and operator handling.

Specifications

  • Laboratory/process: process
  • Applications: for liquids

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