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  • Thermal evaporator / process
  • Thermal evaporator / process

BAK 901

Article: 00058905

Thermal evaporator / process

Process bigger batch sizes without compromise on batch times, film quality and yields.

BAK901 in a nutshell
Fast processing for bigger batch sizes
Available in standard and extended throw
Footprint of only 6m²

Platform overview
With batch sizes of 51 and 23 pieces for 4 and 6 inch substrates respectively in standard calotte processing, the 901 offers around 25% more capacity than the BAK761. A larger baseplate space means the system can be configured with combinations of ion, e gun and thermal sources with plenty of space to spare for easy operator access during replenishment or maintenance.

Specifications

  • Type: thermal
  • Laboratory/process: process

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