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Nano Positioning Stages

Aerotech

QNPHD series

Article: 00091216

Linear nanopositioning stage / piezoelectric / 1-axis / high-speed

Closed-loop travels from 10 ?m to 40 ?m
Direct-drive actuation enables fast response times and higher-throughput processes
High-precision, frictionless flexure guidance
Long device lifetime
Superior positioning resolution and linearity with direct-metrology capacitive sensor option
Open-loop and vacuum versions

Aerotech?s QNPHD piezo nanopositioning stages provide the benefits of both a stage and actuator in one compact, high-stiffness package. With a direct-metrology, capacitive sensor feedback option, high resonant frequencies and high load capacity, the QNPHD is ideal for a wide range of high-speed and high-precision applications such as scanning probe microscopy, disc-drive testing, or semiconductor wafer articulation.

Specifications

  • Orientation: linear
  • Technology: piezoelectric
  • Number of axes: 1-axis
  • Other characteristics: high-speed, compact
  • Stroke: Min.: 10 µm

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