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Article: 00091252

Linear nanopositioning stage / piezoelectric / XYZ

When using the piezo stage, the laser beam stay put into a position; the sample is moved across the beam. The XYZ PZT is an actuated linear nanopositioning stage of exceptional resolution and stability. The 2.6" x 2.6" hole in the stage center is ideal for applications involving transmitted beams, multiple probes or inverted optics. With its large distance of travel and high stability, the PZT is ideal for the most challenging microscopy and positioning applications. The PZT comes complete with position sensitive detectors for closed loop operation.

The stage is manufactured from a high performance Al alloy. actuators are preloaded within the PZT and supply the driving force for stage movement. The flexure hinges, which form the guidance mechanism, are cut into the stage using electric discharge machining (EDM). EDM is also used to form integrated amplifiers that increase the range of motion of the PZT actuators for the X, Y and Z axis. The PZT actuators are oriented perpendicular to the stage motion direction and within these amplifiers.

Specifications

  • Orientation: linear
  • Technology: piezoelectric
  • Number of axes: XYZ

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