P-750 series

Article: 00091222

Wafer inspection and metrology nanopositioning system

1 nm lateral guiding accuracy
Frictionless, high- precision flexure guiding
system
Load capacity to 10 kg
Resolution Direct metrology with capacitive sensors for
highest precision
Direct drive for Fast response
Travel range 75 µm
Outstanding lifetime due to PICMA®
piezo
actuators

Specifications

  • Applications: for wafer inspection and metrology

Other items

In this category | In this category, (Physik Instrumente)

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