PlanarDL series

Article: 00089582

Linear stage / linear motor-driven / XY / low-profile

Aerotechs PlanarDL series are mechanical bearing, linear-motor stages are designed to deliver high geometric and dynamic performance. The PlanarDL has a compact low profile package combined with a number of travel option makes it an ideal solution for various applications such as ranging from surface profilometry to LED wafer scribing.

Specifications

  • Orientation: linear
  • Technology: linear motor-driven
  • Number of axes: XY
  • Other characteristics: low-profile, compact
  • Stroke: Min.: 100 mm
  • Speed: Min.: 0 m/s (0 ft/s)

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