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max. 100 µm | PSX100Y100

Article: 00089667

Piezoelectric stage / XY

The PSX100Y100 stages are designed to seemlessly integrate into metrology applications, nano-motion machines, optical alignment, laser measurement, x-ray metrology, nano-automation, and research applications. The unique internal flexure design provides wear-free and highly planar motion.

Specifications

  • Technology: piezoelectric
  • Number of axes: XY
  • Stroke: Min.: 0 µm

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