Implement Industry Ideas

P-620.1 ? P-629.1

Article: 00089585

Linear stage / piezo / XY / Z-axis

Resolution to 0.1 nm
Positioniergenauigkeit 0.02 %
Direct metrology with capacitive sensors
X, XY, Z, XYZ versions

Specifications

  • Orientation: linear
  • Technology: piezo
  • Number of axes: XY, Z-axis, XYZ
  • Stroke: Min.: 50 µm

Other items

In this category | In this category, (Physik Instrumente)

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