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Wafer Ion-implanting

Article: 00089690

XY positioning system / rotary / laser / vacuum

General Specifications:

1 hot zone station- 7 cool statoins
1100oC in vacuum atmosphere
High precision DC power supply
Servo controlled motion
Large rear access port
Large loading door
Evacuation and inert gas system

Specifications

  • Number of axes: XY
  • Features: rotary, laser
  • Applications: vacuum, for the semiconductor industry
  • Other characteristics: servo controlled

Other items

In this category | In this category, (Materials Research Furnaces)

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