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MS15

Article: 00089604

Translation stage / piezoelectric / XY / vacuum-compatible

MS15 xy-mounted (vacuum edition)
for high vacuum conditions up to 10^(-6) mbar 3.5 mm travel in x and y direction 15 x 15 mm footprint
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Ultra small miniature translation stages with piezo electic inertial drive. Vacuum edition of MS15.

Specifications

  • Technology: piezoelectric, translation
  • Number of axes: XY
  • Other characteristics: vacuum-compatible, miniature

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